3D measurement system for form & finish
InfiniteFocusSL
InfiniteFocusSL is a cost efficient optical 3D measurement system for easy, fast and traceable measurement of form and finish on micro structured surfaces. Users measure both form and roughness of components with only one system. In addition, color images with high contrast and depth of focus are achieved. The long working distance of up to 33mm in combination with its measurement field of 50mm x 50mm allows a wide range of applications. Measurements are achieved in seconds and features, such as a coaxial laser for quick and easy focusing, further increase usability. With an automation interface, InfiniteFocusSL is also applied for fully automatic measurement in production.
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Technical Specifications
| Measurement principle | non-contact, optical, three-dimensional, based at Focus-Variation |
| Positioning volume (X x Y x Z) |
RL objectives: mot.: 50 mm x 50 mm x 155 mm (Z: 25 mm mot., 130 mm man.) = 387500 mm³ SXRL/AXRL objectives: mot.: 50 mm x 50 mm x 120 mm (Z: 25 mm mot., 95 mm man.) = 300000 mm³ |
| Objective magnification | 10x | 20x | 50x | 2xSX | 4xAX* | 5xAX | 10xAX | 20xAX | 50xSX | |
| Working distance | mm | 17.5 | 16 | 10.1 | 34 | 30 | 34 | 33.5 | 20 | 13 |
|
Lateral measurement area (X,Y) (X x Y) |
mm mm² |
2 4 |
1 1 |
0.4 0.16 |
10 100 |
4.87 23.72 |
3.61 13.03 |
2 4 |
1 1 |
0.4 0.16 |
| Vertical resolution | nm | 100 | 50 | 20 | 3500 | 620 | 460 | 130 | 70 | 45 |
| Height step accuracy (1 mm) | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| Max. measurable area | mm² | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 |
| Min. measurable roughness (Ra) | µm | 0.3 | 0.15 | 0.08 | --- | --- | --- | 0.45 | 0.25 | 0.15 |
| Min. measurable roughness (Sa) | µm | 0.15 | 0.075 | 0.05 | --- | --- | --- | 0.25 | 0.1 | 0.08 |
| Min. measurable radius | µm | 5 | 3 | 2 | 20 | 12 | 10 | 5 | 3 | 2 |
| *Available from Q2 2021 |
For more information download the product flyer or send us a request.
High measuring point density
Up to 500 million measurement points ensure a meticulously detailed measurement with tolerances in the μm and sub-μm range along with large working distance. The high measurement point density ofFocus-Variation enables operators to gain a consistently high lateral and vertical resolution across high measurement volumes.
Measurement of steep flanks
Light coming from different directions is used to positively influence a measurement. The measurement of the maximum flank angle is not restricted by the numerical aperture of an objective. Depending on the surface users measure surfaces with slope angles up to 87°.
Full form measurement with Real3D
Using Real3D, users measure surfaces from numerous perspectives. Single measurements are automatically merged into a full 3D dataset. High-precision and calibrated rotation and tilt axes ensure automated, repeatable and traceable measurement on the whole measurement object.
Focus-Variation Technology
Alicona measurement systems are based on the technology of Focus-Variation and combine the functionalities of a surface roughness measurement device and a form measurement system. Each Alicona measurement instrument is a surface measurement device, surface roughness measurement system, 3D measurement system for geometrical tolerancing and micro coordinate measurement system. The Focus-Variation technology combines the small depth of focus of an optical system with vertical scanning to provide topographical and color information from the variation of focus. The main component of the system is a precision optics containing various lens systems that can be equipped with different objectives, allowing measurements with different resolution.
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